NANO 530: NANOFABRICATION

Spring 2007

Instructor

Dr. Kiki Ikossi. E-mail: kikossi@gmu.edu

Office: Research I, Room 367. Office Hours Wednesday (6:00 pm-7:00 pm)

Class Meetings

Robinson Hall, Room B208. 7:20 pm to 10:00 pm, Wednesday, January 22, 2007-May 10, 2007. (NANO 530 Nanofabrication: 13056)

Scope

The Nano530 - Nanofabrication course is designed to teach the elements of science and technology needed in nanostructure fabrication and examination of objects at nanometer scale. The topics of the course expose the student to the techniques available to fabricate nanostructures and devices and provide the necessary scientific background to understand the technology behind nanofabrication. This course serves as part of the sequence towards a nanotechnology certificate.

Topics

· Introduction from micro- to nano-fabrication

o Nanostructures

o Nano-crystals

o Self assembly

· Deposition techniques

o Molecular Beam Epitaxy (MBE, ALE)

o Chemical Vapor Deposition techniques (CVD, MOCVD, HVPE)

o Pulsed Laser Deposition

o Sputtering

o Ion Implantation, doping

· Etching and Patterning

o Photolithography and related chemistry

o e-beam lithography, scanning probe lithography

o Chemical etching

o Plasma etching

o Nano-imprint,

· Devices

o Functionality

o Interfaces

o Contacts

o Elements of Bio-Sensors, MEMS, Optoelectronic devices

Grading

Assignments: 30%; Midterm: 30%; Final: 40%

Literature

Hari Singh Najwa “Nanostructure material and nanotechnology, ”Concise Ed (Academic Press Inc.)

Marc J. Madu, “Fundamentals of microfabrication. The Science of Miniaturization,” (CRC press)

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Last modified: Monday January 2, 2006